Patent Assignment
Reel/Frame 045257/0183
Assignment of Assignor's Interest
Recorded: 2018-03-16
Pages: 3
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Metrology Apparatus, Lithographic System, and Method of Measuring a Structure