Assignment of Assignor's Interest

Recorded: 2018-03-19 Pages: 6

Assignors

SASAKI, TAKAFUMI

Executed: 2018-01-31

KAMIMURA, DAIGI

Executed: 2018-01-31

YOSHIDA, HIDENARI

Executed: 2018-01-31

Assignee

HITACHI KOKUSAI ELECTRIC INC.

15-12, NISHI-SHIMBASHI 2-CHOME,, MINATO-KU, TOKYO, 105-8039, JAPAN

Covered Property (1)

Gas Supply System, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device

Application: 15/923,796 →

Publication: US 2018/0202043

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.