Patent Assignment
Reel/Frame 045265/0486
Assignment of Assignor's Interest
Recorded: 2018-03-19
Pages: 7
Assignors
KAMAKURA, TSUKASA
Executed: 2018-02-14
KURIBAYASHI, KOEI
Executed: 2018-02-14
YAMAGUCHI, DAIGO
Executed: 2018-02-14
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME,, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.