Patent Assignment
Reel/Frame 045282/0789
Assignment of Assignor's Interest
Recorded: 2018-03-20
Pages: 7
Assignors
YAMAMOTO, KAZUYOSHI
Executed: 2018-02-09
UEDA, OSAMU
Executed: 2018-02-09
ASAI, KAZUHIDE
Executed: 2018-02-09
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME,, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Substrate Processing System, Substrate Processing Apparatus and Management Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.