Patent Assignment
Reel/Frame 045284/0268
Assignment of Assignor's Interest
Recorded: 2018-03-20
Pages: 7
Assignors
TAKAHASHI, SHUICHI
Executed: 2018-03-13
MIYADATE, TAKAHARU
Executed: 2018-03-13
BANSE, TAKANORI
Executed: 2018-03-13
TAKAYOSHI, JOJI
Executed: 2018-03-13
MORIYA, RUMIKO
Executed: 2018-03-13
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus