Patent Assignment
Reel/Frame 045322/0678
Assignment of Assignor's Interest
Recorded: 2018-03-23
Pages: 8
Assignors
TAKAGI, KOSUKE
Executed: 2018-03-02
YAMAKOSHI, RISA
Executed: 2018-02-28
HORITA, HIDEKI
Executed: 2018-03-12
HIRANO, ATSUSHI
Executed: 2018-03-12
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.