IP Library › Assignment 045331/0759
Patent Assignment
Reel/Frame 045331/0759

Merger

Recorded: 2018-02-14 Pages: 5
Assignor
CARL ZEISS SMS GMBH
Executed: 2015-05-12
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, D-73447, GERMANY
Covered Property (1)
Illumination Optical Unit for a Metrology System and Metrology System Comprising Such an Illumination Optical Unit
Application: 15/895,210 →
Publication: US 2018/0173001
Related Assignments (2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Feb 14, 2018
From: DOERING, DIRK
To: CARL ZEISS AG
Reel/Frame 044919/0919 →
Assignment of Assignor's Interest Feb 14, 2018
From: FRANK, THOMAS; SEITZ, HOLGER; LAENGLE, MARIO; MATEJKA, ULRICH
To: CARL ZEISS SMS GMBH
Reel/Frame 044919/0930 →