Patent Assignment
Reel/Frame 045357/0178
Assignment of Assignor's Interest
Recorded: 2018-03-27
Pages: 2
Assignee
L'AIR LIQUIDE, SOCIÉTÉ ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCÉDÉS GEORGES CLAUDE
75 QUAI D'ORSAY, PARIS, F-75007, FRANCE
Covered Property
(1)
Methods of Minimizing Plasma-Induced Sidewall Damage During Low K Etch Processes
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.