Patent Assignment
Reel/Frame 045374/0046
Assignment of Assignor's Interest
Recorded: 2018-03-28
Pages: 6
Assignors
AMIT, ERAN
Executed: 2017-10-10
VOLKOVICH, ROIE
Executed: 2017-09-13
YERUSHALMI, LIRAN
Executed: 2017-09-13
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Lithography Systems with Integrated Metrology Tools Having Enhanced Functionalities