Patent Assignment
Reel/Frame 045378/0345
Assignment of Assignor's Interest
Recorded: 2018-03-28
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Inspecting Flow Rate Controller and Method for Processing Workpiece