Patent Assignment
Reel/Frame 045392/0205
Assignment of Assignor's Interest
Recorded: 2018-03-29
Pages: 6
Assignors
YAMAMOTO, SATORU
Executed: 2018-02-15
NAKANISHI, MASAYUKI
Executed: 2018-02-15
KODERA, KENJI
Executed: 2018-02-15
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Vacuum Suction Pad and Substrate Holder