Patent Assignment
Reel/Frame 045395/0499
Assignment of Assignor's Interest
Recorded: 2018-03-30
Pages: 3
Assignors
FAN, CHENG-LI
Executed: 2017-11-28
CHEN, CHIH-HAO
Executed: 2017-11-28
CHEN, WEN-YEN
Executed: 2017-11-28
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, TAIWAN
Covered Property
(1)
Multiple Patterning Method Using Mask Portions to Etch Semiconductor Substrate