Patent Assignment
Reel/Frame 045398/0722
Assignment of Assignor's Interest
Recorded: 2018-03-30
Pages: 6
Assignors
MOHANTY, NIHAR
Executed: 2017-11-10
FRANKE, ELLIOTT
Executed: 2017-11-13
FARRELL, RICHARD
Executed: 2017-11-14
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Fully Self-Aligned via Formation Using a Directed Self Assembly (Dsa) Process