Patent Assignment
Reel/Frame 045406/0889
Assignment of Assignor's Interest
Recorded: 2018-04-02
Pages: 2
Assignee
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
1-61, SHIROMI 2-CHOME, CHUO-KU, OSAKA-SHI, OSAKA, 540-6207, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method