Patent Assignment
Reel/Frame 045422/0267
Assignment of Assignor's Interest
Recorded: 2018-04-03
Pages: 4
Assignors
KAWAKAMI, SHINICHIRO
Executed: 2018-03-31
MIZUNOURA, HIROSHI
Executed: 2018-03-23
HATAKEYAMA, SHINICHI
Executed: 2018-03-23
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method and Recording Medium