Patent Assignment
Reel/Frame 045425/0449
Assignment of Assignor's Interest
Recorded: 2018-04-03
Pages: 5
Assignors
LEE, YUNG-YAO
Executed: 2017-12-20
KUO, HUNG-MING
Executed: 2017-12-20
PENG, JUI-CHUN
Executed: 2017-12-21
LIU, HENG-HSIN
Executed: 2017-12-27
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Exposure Method and Exposure Apparatus