Patent Assignment
Reel/Frame 045426/0659
Assignment of Assignor's Interest
Recorded: 2018-04-03
Pages: 11
Assignors
BI, ZHENXING
Executed: 2018-03-27
CHENG, KANGGUO
Executed: 2018-03-27
LOUBET, NICOLAS J.
Executed: 2018-03-29
MIAO, XIN
Executed: 2018-03-27
XU, WENYU
Executed: 2018-03-27
ZHANG, CHEN
Executed: 2018-03-27
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Gate Spacer and Inner Spacer Formation for Nanosheet Transistors Having Relatively Small Space Between Gates