Patent Assignment
Reel/Frame 045435/0102
Assignment of Assignor's Interest
Recorded: 2018-04-04
Pages: 4
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device Including Ferroelectric Layer Having Columnar-Shaped Crystals