Patent Assignment
Reel/Frame 045437/0271
Assignment of Assignor's Interest
Recorded: 2018-04-04
Pages: 5
Assignors
WANG, CHUNG-MING
Executed: 2015-10-06
PENG, CHIH-HSIUNG
Executed: 2015-10-06
CHANG, CHI-KANG
Executed: 2015-10-06
CHEN, KUEI-SHUN
Executed: 2015-10-06
FU, SHIH-CHI
Executed: 2015-10-06
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method and Structure for Mandrel and Spacer Patterning