Patent Assignment
Reel/Frame 045452/0523
Assignment of Assignor's Interest
Recorded: 2018-04-05
Pages: 7
Assignors
LIN, WEI-LIANG
Executed: 2018-03-14
TSENG, CHIN-YUAN
Executed: 2018-03-06
LIN, LI-TE
Executed: 2018-03-19
CAO, MIN
Executed: 2018-03-20
LIU, RU-GUN
Executed: 2018-03-19
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Fin Patterning Methods for Increased Process Margins