Patent Assignment
Reel/Frame 045468/0945
Assignment of Assignor's Interest
Recorded: 2018-02-28
Pages: 11
Assignors
KAWABUCHI, YOSUKE
Executed: 2018-02-21
GOSHI, GENTARO
Executed: 2018-02-21
EGASHIRA, KEISUKE
Executed: 2018-02-27
OHNO, HIROKI
Executed: 2018-02-22
MARUMOTO, HIROSHI
Executed: 2018-02-20
MASUZUMI, TAKURO
Executed: 2018-02-21
TSUKANO, KENTO
Executed: 2018-02-22
KITAYAMA, SHOTARO
Executed: 2018-02-21
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus