Patent Assignment
Reel/Frame 045485/0199
Assignment of Assignor's Interest
Recorded: 2018-04-10
Pages: 6
Assignors
KUENLE, MATTHIAS
Executed: 2017-09-25
BAUMGARTL, JOHANNES
Executed: 2017-09-25
ENGELHARDT, MANFRED
Executed: 2017-09-20
ILLEMANN, CHRISTIAN
Executed: 2017-09-26
SANTOS RODRIGUEZ, FRANCISCO JAVIER
Executed: 2017-09-21
STORBECK, OLAF
Executed: 2018-03-21
Assignee
INFINEON TECHNOLOGIES AG
AM CAMPEON 1-12, NEUBIBERG, 85579, GERMANY
Covered Property
(1)
Apparatus and Method for Chemical Vapor Deposition Process for Semiconductor Substrates