Patent Assignment
Reel/Frame 045489/0274
Assignment of Assignor's Interest
Recorded: 2018-04-10
Pages: 3
Assignors
SUGITA, KIPPEI
Executed: 2018-03-23
NAGAI, KENJI
Executed: 2018-03-27
KIMURA, HIDETOSHI
Executed: 2018-03-27
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Position Detecting System and Processing Apparatus