Patent Assignment
Reel/Frame 045492/0431
Assignment of Assignor's Interest
Recorded: 2018-03-05
Pages: 3
Assignors
MIYAZAKI, KAZUHITO
Executed: 2018-02-20
KAKINO, AKIRA
Executed: 2018-02-26
YOSHITOMI, WATARU
Executed: 2018-02-20
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Droplet Ejecting Apparatus and Droplet Ejecting Method in Which Relative Positions of Workpiece Table and Droplet Ejecting Head Are Corrected