Patent Assignment
Reel/Frame 045504/0594
Assignment of Assignor's Interest
Recorded: 2018-04-11
Pages: 2
Assignor
KUYEL, BIROL
Executed: 2018-04-06
Assignee
NANO-MASTER, INC.
3019 ALVIN DEVANE BLVD., SUITE 300, AUSTIN, TEXAS, 78741
Covered Property
(1)
Techniques and systems for continuous-flow plasma enhanced atomic layer deposition (PEALD)