Patent Assignment
Reel/Frame 045525/0143
Assignment of Assignor's Interest
Recorded: 2018-04-12
Pages: 7
Assignors
BUETTNER, ALEXANDER
Executed: 2018-03-16
PURRUCKER, KERSTIN
Executed: 2018-03-16
PETERLINZ, KEVIN A.
Executed: 2018-03-30
SAPIENS, NOAM
Executed: 2018-02-01
SHCHEGROV, ANDREI V.
Executed: 2018-04-11
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Optical Metrology With Small Illumination Spot Size