Patent Assignment
Reel/Frame 045549/0003
Assignment of Assignor's Interest
Recorded: 2018-04-16
Pages: 6
Assignors
KRISHNA, GOPU
Executed: 2018-03-21
PATIL, RAVIKUMAR
Executed: 2018-03-26
PANAVALAPPIL KUMARANKUTTY, HANISH KUMAR
Executed: 2018-03-21
KAPADIA, SOMIL
Executed: 2018-03-21
KUNNAKKAT, SONNY
Executed: 2018-03-30
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method and Apparatus for Semiconductor Processing Chamber Isolation for Reduced Particles and Improved Uniformity