Patent Assignment
Reel/Frame 045559/0681
Assignment of Assignor's Interest
Recorded: 2018-04-17
Pages: 4
Assignors
KIHARA, YOSHIHIDE
Executed: 2018-04-12
HISAMATSU, TORU
Executed: 2018-04-13
TABATA, MASAHIRO
Executed: 2018-04-12
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Processing Target Object