Patent Assignment
Reel/Frame 045560/0837
Assignment of Assignor's Interest
Recorded: 2018-04-17
Pages: 3
Assignor
MORI, YUKIHIRO
Executed: 2018-04-12
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method