Patent Assignment
Reel/Frame 045563/0761
Assignment of Assignor's Interest
Recorded: 2018-04-17
Pages: 6
Assignors
KWAN, YIM-BUN PATRICK
Executed: 2018-03-19
LORENZ, AXEL
Executed: 2018-03-27
WESSELINGH, JASPER
Executed: 2018-03-29
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical Imaging Arrangement with a Piezoelectric Device