Patent Assignment
Reel/Frame 045598/0931
Assignment of Assignor's Interest
Recorded: 2018-04-20
Pages: 5
Assignors
PARK, SOONAM
Executed: 2014-11-18
ZHU, YUFEI
Executed: 2014-12-01
SUAREZ, EDWIN C.
Executed: 2014-11-19
INGLE, NITIN K.
Executed: 2014-11-18
LUBOMIRSKY, DMITRY
Executed: 2014-11-18
HUANG, JIAYIN
Executed: 2014-11-18
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Systems and Methods for Internal Surface Conditioning Assessment in Plasma Processing Equipment