Patent Assignment
Reel/Frame 045605/0480
Assignment of Assignor's Interest
Recorded: 2018-04-22
Pages: 5
Assignor
LIU, CHAO-HSIANG
Executed: 2018-02-02
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, HSINCHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Systems and Methods for Wafer Pod Alignment