Patent Assignment
Reel/Frame 045616/0575
Confirmatory License
Recorded: 2018-03-16
Pages: 2
Assignor
GEORGIA INSTITUTE OF TECHNOLOGY
Executed: 2018-02-26
Assignee
NATIONAL SCIENCE FOUNDATION
2415 EISENHOWER AVENUE, ROOM W 18000, ALEXANDRIA, VIRGINIA, 22314
Covered Property
(1)
Metal-Assisted Chemical Etching of a Semiconductive Substrate with High Aspect Ratio, High Geometic Uniformity, and Controlled 3D Profiles
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.