Patent Assignment
Reel/Frame 045621/0329
Assignment of Assignor's Interest
Recorded: 2018-04-24
Pages: 5
Assignors
ASHIZAWA, HIROAKI
Executed: 2018-04-09
FUJII, YASUSHI
Executed: 2018-04-10
TAKAHASHI, TSUYOSHI
Executed: 2018-04-10
HONG, SEOKHYOUNG
Executed: 2018-04-10
YAMAZAKI, KAZUYOSHI
Executed: 2018-04-10
NAKAMURA, HIDEO
Executed: 2018-04-10
NUNOSHIGE, YU
Executed: 2018-04-10
KAMIO, TAKASHI
Executed: 2018-04-11
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Film Forming Method and Film Forming Apparatus