Patent Assignment
Reel/Frame 045629/0259
Assignment of Assignor's Interest
Recorded: 2018-04-25
Pages: 3
Assignors
WEGMANN, ULRICH
Executed: 2018-01-18
STIEPAN, HANS-MICHAEL
Executed: 2018-01-15
HETZLER, JOCHEN
Executed: 2018-01-11
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Measuring Method and Measuring Arrangement for an Imaging Optical System