Patent Assignment
Reel/Frame 045658/0083
Assignment of Assignor's Interest
Recorded: 2018-04-27
Pages: 7
Assignors
FUKIAGE, NORIAKI
Executed: 2017-12-04
OSHIMO, KENTARO
Executed: 2017-12-04
OTSUKI, SHIMON
Executed: 2017-12-10
HANE, HIDEOMI
Executed: 2017-12-06
OGAWA, JUN
Executed: 2017-12-06
IKEGAWA, HIROAKI
Executed: 2016-12-15
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device and Apparatus of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.