Patent Assignment
Reel/Frame 045658/0204
Assignment of Assignor's Interest
Recorded: 2018-04-27
Pages: 7
Assignors
OGAWA, ARITO
Executed: 2015-07-17
HARADA, KAZUHIRO
Executed: 2015-07-14
KAGA, YUKINAO
Executed: 2015-07-14
ITATANI, HIDEHARU
Executed: 2015-07-14
ASHIHARA, HIROSHI
Executed: 2015-07-14
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Application:
15/961,277 →
Publication:
US 2018/0247819
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.