Patent Assignment
Reel/Frame 045697/0135
Assignment of Assignor's Interest
Recorded: 2018-05-02
Pages: 2
Assignor
XIAO, HONG
Executed: 2018-05-01
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Properties
(2)
Scan Strategies to Minimize Charging Effects and Radiation Damage of Charged Particle Beam Metrology System
Scan Strategies to Minimize Charging Effects and Radiation Damage of Charged Particle Beam Metrology System
Application:
62/639,603 →