IP Library › Patent Application 62639603
Patent Application Provisional
App. No. 62/639,603 · Confirmation No. 6671

Scan Strategies to Minimize Charging Effects and Radiation Damage of Charged Particle Beam Metrology System

Inventor: Hong Xiao
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2018-03-09 APP.FILE.REC Filing Receipt 3 View
2018-03-07 TR.PROV Provisional Cover Sheet (SB16) 3 View
2018-03-07 SPEC Specification 3 View
2018-03-07 DRW Drawings-only black and white line drawings 4 View
2018-03-07 APPENDIX Appendix to the specification 11 View
2018-03-07 WFEE Fee Worksheet (SB06) 2 View
2018-03-07 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
62/639,603
Filed
2018-03-07