Patent Assignment
Reel/Frame 045705/0329
Assignment of Assignor's Interest
Recorded: 2018-05-03
Pages: 6
Assignors
HETZLER, JOCHEN
Executed: 2017-12-19
FUCHS, SEBASTIAN
Executed: 2017-12-19
STIEPAN, HANS-MICHAEL
Executed: 2017-12-19
SCHUSTER, KARL-HEINZ
Executed: 2018-01-18
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Interferometric Measuring Arrangement