Patent Assignment
Reel/Frame 045744/0552
Assignment of Assignor's Interest
Recorded: 2018-05-08
Pages: 8
Assignors
GUREVICH, EVGENI
Executed: 2018-03-15
ADEL, MICHAEL E.
Executed: 2018-05-07
GRONHEID, ROEL
Executed: 2018-03-19
FELER, YOEL
Executed: 2018-03-14
LEVINSKI, VLADIMIR
Executed: 2018-03-12
KLEIN, DANA
Executed: 2018-03-14
AHARON, SHARON
Executed: 2018-03-14
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DR., MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Determining the Impacts of Stochastic Behavior on Overlay Metrology Data