Patent Assignment
Reel/Frame 045745/0598
Assignment of Assignor's Interest
Recorded: 2018-05-08
Pages: 6
Assignors
UEDA, SHINYA
Executed: 2018-05-07
EBISUDANI, TAISHI
Executed: 2018-05-07
SUZUKI, TOSHIYA
Executed: 2018-05-08
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
PLASMA ENHANCED ATOMIC LAYER DEPOSITION (PEALD) OF SiN USING SILICON-HYDROHALIDE PRECURSORS