Patent Assignment
Reel/Frame 045775/0905
Assignment of Assignor's Interest
Recorded: 2018-05-11
Pages: 7
Assignors
ASHIHARA, HIROSHI
Executed: 2018-03-01
HARADA, KAZUHIRO
Executed: 2018-03-09
NAKATANI, KIMIHIKO
Executed: 2018-03-02
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
15-12, NISHI-SHIMBASHI 2-CHOME, MINATO-KU, TOKYO, 1058039, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, Recording Medium, and Supply System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.