Patent Assignment
Reel/Frame 045777/0026
Assignment of Assignor's Interest
Recorded: 2018-05-11
Pages: 5
Assignor
KATO, HITOSHI
Executed: 2018-04-24
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus