Patent Assignment
Reel/Frame 045821/0061
Assignment of Assignor's Interest
Recorded: 2018-05-16
Pages: 3
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method of Measuring a Parameter of Interest, Device Manufacturing Method, Metrology Apparatus, and Lithographic System