Patent Assignment
Reel/Frame 045824/0814
Assignment of Assignor's Interest
Recorded: 2018-05-16
Pages: 4
Assignors
LEE, KUN-YU
Executed: 2018-03-20
CHANG, HUICHENG
Executed: 2018-03-20
CHANG, CHE-HAO
Executed: 2018-03-20
SU, CHING-HWANQ
Executed: 2018-03-20
CHANG, WENG
Executed: 2018-03-20
YU, XIONG-FEI
Executed: 2018-03-20
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, TAIWAN
Covered Property
(1)
Method for Patterning a Lanthanum Containing Layer