Patent Assignment
Reel/Frame 045840/0822
Assignment of Assignor's Interest
Recorded: 2018-05-18
Pages: 7
Assignors
NAM, SANG KI
Executed: 2018-03-30
KOSHIISHI, AKIRA
Executed: 2018-03-30
HEO, KWANGYOUB
Executed: 2018-04-02
KANG, SUNGGIL
Executed: 2018-04-02
YOO, BEOMJIN
Executed: 2018-03-30
LIM, SUNGYONG
Executed: 2018-04-02
PASHKOVSKIY, VASILY
Executed: 2018-04-02
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Plasma Processing Apparatus and Method of Manufacturing Semiconductor Device Using the Same