Patent Assignment
Reel/Frame 045875/0559
Assignment of Assignor's Interest
Recorded: 2018-05-22
Pages: 2
Assignee
VERSUM MATERIALS US, LLC
8555 SOUTH RIVER PARKWAY, PATENT DEPT., TEMPE, ARIZONA, 85284
Covered Property
(1)
Functionalized Cyclosilazanes as Precursors For High Growth Rate Silicon-Containing Films