Patent Assignment
Reel/Frame 045881/0772
Assignment of Assignor's Interest
Recorded: 2018-05-23
Pages: 2
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Electrostatic Chuck and Plasma Processing Apparatus