Patent Assignment
Reel/Frame 045892/0324
Assignment of Assignor's Interest
Recorded: 2018-05-24
Pages: 8
Assignors
KOBAYASHI, ATSUSHI
Executed: 2014-04-08
TABUCHI, ATSUHIKO
Executed: 2014-04-08
WAKAI, HIDEKI
Executed: 2014-04-08
ITOH, KAZUTOSHI
Executed: 2014-04-08
HIROSE, YASUHISA
Executed: 2014-04-08
NISHIKAWA, KEIICHI
Executed: 2014-04-08
MINATANI, TAKAHIRO
Executed: 2014-04-08
Assignees
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
CKD CORPORATION
250, OUJI 2-CHOME, KOMAKI-SHI,, AICHI, 485-8551, JAPAN
Covered Property
(1)
Temperature Control System, Semiconductor Manufacturing Device, and Temperature Control Method